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Description
Category: RIE
Original Equipment Manufacturer: Oxford
Condition:Refurbished
Price: Please contact us.
Valid Time: Subject to prior sale without notice
Lead Time: 8-12 weeks depending on PO time
Location: U.S.A.
Warranty: 7 months
Oxford Instruments Plasmalab 80 Plus Reactive Ion Etch RIE System
Specifications:
- Process: Reactive Ion Etch
- RF Generator Dressler HiLight 133 – 300 Watt, 13.56 MHz
- Automatch Text: Oxford OPT AMU
- Neslab RTE 7 Chiller or equivalent,No warranty
- Vacuum Pump Package: Leybold WSU 251 and Leybold D40BCS or equivalent,No warranty
- Power requirements: 208 V, 26 A, 50/60 Hz, 3 Phase
- Wafer size: 200 mm maximum
- Controller type: PC Controller
- Software revision level: PC2000 Version 1.7A
- Number of gas inputs: 3
- Process gases: CF4, O2, Air
- Gas Pod: 6 gas inputs (3 inputs in use)
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